Multirate PWM Control of Precision Stage for Ultrahigh-Speed Nanoscale Positioning
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEJ Journal of Industry Applications
سال: 2014
ISSN: 2187-1094,2187-1108
DOI: 10.1541/ieejjia.3.270